000			00442nam a2200157Ia 4500
999			_c6628 _d6628
008			140515s9999||||xx |||||||||||||| ||und||
040			_aUPES LIBRARY _bEnglish
082			_a621.3815 _bGHA
100			_aGhanhii, Sorab K _92770
245			_aVLSI Fabrication Principles Silicon and Gallium Arsenide
250			_a2nd ed.
260			_aNew York: _bJohn Wiley , _c2003
650			_aElectrical Engineering _945865
942			_cBK