| 000 | 00585nam a2200205Ia 4500 | ||
|---|---|---|---|
| 005 | 20210608153809.0 | ||
| 008 | 140515s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780195681444 | ||
| 040 |
_aUPES LIBRARY _bEnglish |
||
| 082 |
_a621.381 _bCAM |
||
| 100 |
_aCampbell, Stephen A. _91235 |
||
| 245 | _aScience and engineering of microelectronic fabrication | ||
| 250 | _a2nd | ||
| 260 |
_aNew York: _bOxford Uninversity Press, _c2008 |
||
| 300 | _a603p. | ||
| 650 | _aElectronics | ||
| 653 | _aSemiconductors - design and construction | ||
| 654 | _aMicroelectronics | ||
| 942 | _cBK | ||
| 999 |
_c6596 _d6596 |
||