| 000 | 00483nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20230707152733.0 | ||
| 008 | 140515s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780070487093 | ||
| 040 | _aUPES LIBRARY | ||
| 082 |
_a621.381 _bHSU |
||
| 100 |
_aHsu, Tai -Ran _912298 |
||
| 245 | _aMems and microsystems design and manufacture | ||
| 260 |
_aNew Delhi : _bTata McGraw Hill, _c2012 |
||
| 300 | _a436p. | ||
| 650 | _aElectronics | ||
| 650 |
_aMicroelectronics _912300 |
||
| 942 | _cBK | ||
| 999 |
_c6544 _d6544 |
||