| 000 | 00467nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20230505154428.0 | ||
| 008 | 150122b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 040 |
_aUPES LIBRARY _bEnglish |
||
| 082 |
_a621.381 _bHSU |
||
| 100 |
_aHsu, Tai-Ran _912298 |
||
| 245 |
_aMEMS and microsystems _b: design and manufacture |
||
| 260 |
_aNew Delhi : _bMcGraw Hill, _c2014 |
||
| 300 | _axii, 436p. | ||
| 650 |
_aElectronics _9744681 |
||
| 942 | _cBB | ||
| 999 |
_c21698 _d21698 |
||