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Science and engineering of microelectronic fabrication

Campbell, Stephen A.

Science and engineering of microelectronic fabrication - 2nd - New York: Oxford Uninversity Press, 2008 - 603p.

ISBN: 9780195681444

Subjects--Topical Terms:
Electronics

Subjects--Index Terms: Semiconductors - design and construction

Subjects--Facted Index Terms:
Microelectronics

Dewey Class. No.: 621.381 / CAM

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